Auger analysis of plasma-grown GaAs oxide films
- 16 November 1983
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 80 (1) , K11-K14
- https://doi.org/10.1002/pssa.2210800148
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Physical properties of plasma-grown GaAs oxidesJournal of Vacuum Science and Technology, 1979
- Multiple insulator layers on GaAs studied by Auger analysisInternational Journal of Electronics, 1979
- Plasma‐Grown Oxide on GaAs: Semiquantitative Chemical Depth Profiles Obtained Using Auger Spectroscopy and Neutron Activation AnalysisJournal of the Electrochemical Society, 1978