Multiple insulator layers on GaAs studied by Auger analysis
- 1 February 1979
- journal article
- Published by Taylor & Francis in International Journal of Electronics
- Vol. 46 (2) , 209-214
- https://doi.org/10.1080/00207217908900987
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Invited paper. Anodic oxides on GaAs. I. Anodic native oxides on GaAsInternational Journal of Electronics, 1978
- Plasma oxidation of aluminum film on GaAs—A study by Auger spectroscopy and transmission electron microscopyApplied Physics Letters, 1977
- Stable charge storage of m.a.o.s. diodes on GaAs by new anodic oxidationElectronics Letters, 1977
- The application of tailored modulation techniques to depth profiling with auger electron spectroscopySurface Science, 1976
- AUGER ELECTRON SPECTROSCOPYPublished by Elsevier ,1975