Invited paper. Anodic oxides on GaAs. I. Anodic native oxides on GaAs
- 1 October 1978
- journal article
- research article
- Published by Taylor & Francis in International Journal of Electronics
- Vol. 45 (4) , 337-352
- https://doi.org/10.1080/00207217808900921
Abstract
The anodic oxidation of GaAs is a technologically simple and a low temperature process enabling the production of reproducible high-quality native oxides on GaAs. The paper describes the influence of the GaAs properties and the best conditions for the anodic behaviour of GaAs. The initial phase of the oxide formation was also investigated in two different electrolytes. The minimum thickness of the native oxide covering the whole surface of GaAs was found to be a function of the anodic current density employed and can be as thin as 11 Å.Keywords
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