Oxidation of Si and GaAs in air at room temperature
- 1 March 1972
- journal article
- Published by Elsevier in Surface Science
- Vol. 30 (1) , 91-100
- https://doi.org/10.1016/0039-6028(72)90025-8
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- The kinetics and pressure dependence of surface controlled metal oxidation reactionsSurface Science, 1969
- Thermal oxidation of gallium arsenideCzechoslovak Journal of Physics, 1968
- Optical measurements of oxide films on siliconCzechoslovak Journal of Physics, 1963
- Optical Measurement of Film Growth on Silicon and Germanium Surfaces in Room AirJournal of the Electrochemical Society, 1957