Mass spectra of silicon containing industrial gases
- 28 February 1975
- journal article
- Published by Elsevier in Materials Research Bulletin
- Vol. 10 (2) , 81-83
- https://doi.org/10.1016/0025-5408(75)90124-5
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Mass Spectrometric Studies of Vapor Phase Crystal GrowthJournal of the Electrochemical Society, 1971
- Electron impact study of ionization and dissociation of monosilane and disilaneThe Journal of Physical Chemistry, 1969