Helium ion implantation in SiAlON: Characterisation of cavity structures using TEM and IBA
- 2 May 2000
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 166-167, 121-127
- https://doi.org/10.1016/s0168-583x(99)00645-x
Abstract
No abstract availableKeywords
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