Helium desorption/permeation from bubbles in silicon: A novel method of void production
- 1 July 1987
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 27 (3) , 417-420
- https://doi.org/10.1016/0168-583x(87)90522-2
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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