Preparation and structure of PbZrO3 epitaxial films by metalorganic chemical vapor deposition

Abstract
Single‐crystal PbZrO3 thin films have been grown on (001) SrTiO3 substrates by metalorganic chemical vapor deposition. The single‐crystal nature of c‐axis oriented PbZrO3 film is confirmed by x‐ray diffraction, selective area electron diffraction, and transmission electron microscopy. The epitaxial relationship between the PbZrO3 film and the SrTiO3 substrate was found to be (001)[100]PbZrO3∥(001)[110]SrTiO3.