Atomic layer deposition of ultrathin and conformal Al2O3 films on BN particles
- 1 August 2000
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 371 (1-2) , 95-104
- https://doi.org/10.1016/s0040-6090(00)00973-1
Abstract
No abstract availableKeywords
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