Deposition mechanism of cubic boron nitride
- 30 April 1996
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 5 (3-5) , 519-524
- https://doi.org/10.1016/0925-9635(96)80071-9
Abstract
No abstract availableKeywords
This publication has 36 references indexed in Scilit:
- Growth of cubic BN films on β-SiC by ion-assisted pulsed laser depositionApplied Physics Letters, 1995
- Recent results in cubic boron nitride deposition in light of the sputter modelDiamond and Related Materials, 1995
- Growth mechanism of cubic boron nitride in a r.f. glow dischargeThin Solid Films, 1995
- On the role of ions in the formation of cubic boron nitride films by ion-assisted depositionJournal of Materials Research, 1994
- Ion-assisted pulsed laser deposition of cubic boron nitride filmsJournal of Applied Physics, 1994
- Phase control of cubic boron nitride thin filmsJournal of Applied Physics, 1992
- Boron nitride films synthesized by ion-beam-assisted depositionSurface and Coatings Technology, 1992
- Growth of cubic boron nitride from vapor phaseDiamond and Related Materials, 1992
- Growth of cubic boron nitride on diamond particles by microwave plasma enhanced chemical vapor depositionApplied Physics Letters, 1991
- Effects of a Negative Self-Bias on the Growth of Cubic Boron Nitride Prepared by Plasma Chemical Vapor DepositionJapanese Journal of Applied Physics, 1991