Phase transformation of thin sputter-deposited tungsten films at room temperature
- 1 September 2002
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 20 (5) , 2047-2051
- https://doi.org/10.1116/1.1506905
Abstract
No abstract availableThis publication has 22 references indexed in Scilit:
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