Dry etched high resolution positive and negative inorganic photoresist
- 1 December 1989
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 115 (1-3) , 129-131
- https://doi.org/10.1016/0022-3093(89)90383-9
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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