A batch-fabricated non-reverse valve with cantilever beam manufactured by micromachining of silicon
- 1 July 1989
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 18 (3-4) , 389-396
- https://doi.org/10.1016/0250-6874(89)87044-1
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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