Relationship between Crystal Structure and Chemical Composition of PbTiO3 Thin Films Prepared by Sputter-Assisted Plasma CVD
- 1 June 1992
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 31 (6R)
- https://doi.org/10.1143/jjap.31.1872
Abstract
PbTiO3 thin films were prepared by sputter-assisted plasma chemical vapor deposition (CVD) on Pt-coated glass substrates at a substrate temperature of 500°C. As the source materials, a Pb metal target, TiCl4 gas and O2 gas were used. The crystal structures of the films changed from a pyrochlore phase to a perovskite one, and to a PbO (red) one with increasing Pb/Ti atomic ratio.Keywords
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