Phosphorus gas doping in gas source silicon-MBE
- 1 January 1990
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 184 (1-2) , 125-130
- https://doi.org/10.1016/0040-6090(90)90405-3
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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