Multiple angle ellipsometric analysis of surface layers and surface layer contaminants
- 1 February 1982
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 21 (3) , 518-521
- https://doi.org/10.1364/ao.21.000518
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 6 references indexed in Scilit:
- Optical Properties of the Interface between Si and Its Thermally Grown OxidePhysical Review Letters, 1979
- Optical constants of bulk and thin-film aluminum at 6328 ÅJournal of the Optical Society of America, 1975
- Characterization of real surfaces by ellipsometrySurface Science, 1972
- Parameter-Correlation and Computational Considerations in Multiple-Angle Ellipsometry*Journal of the Optical Society of America, 1971
- Ellipsometric Technique for Obtaining Substrate Optical ConstantsJournal of Applied Physics, 1970
- Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometryJournal of Research of the National Bureau of Standards Section A: Physics and Chemistry, 1963