Parameter-Correlation and Computational Considerations in Multiple-Angle Ellipsometry*

1 December 1971

journal article
Published by Optica Publishing Group in Journal of the Optical Society of America

Vol. 61 (12) , 1622-1629
https://doi.org/10.1364/josa.61.001622

Abstract

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Keywords

This publication has 7 references indexed in Scilit:

Multiple-Angle-of-Incidence Ellipsometry of Very Thin Films*
Journal of the Optical Society of America, 1971
Error analysis of angle of incidence measurements
Surface Science, 1969
Numerical techniques for the analysis of lossy films
Surface Science, 1969
Effect of a Thin Surface Film on the Ellipsometric Determination of Optical Constants*
Journal of the Optical Society of America, 1964
An Algorithm for Least-Squares Estimation of Nonlinear Parameters
Journal of the Society for Industrial and Applied Mathematics, 1963
POLARIMETRIC DETERMINATION OF ABSORPTION SPECTRA OF THIN FILMS ON METAL. I. INTERPRETATION OF OPTICAL DATA^1,2
The Journal of Physical Chemistry, 1961
Optical Constants of Silicon in the Region 1 to 10 ev
Physical Review B, 1960