Optimization and performance of high-resolution micro-optomechanical thermal sensors
- 1 February 1997
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 58 (2) , 113-119
- https://doi.org/10.1016/s0924-4247(96)01401-x
Abstract
No abstract availableKeywords
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