Adsorption kinetics of SiH4, Si2H6 and Si3H8 on the Si(111)-(7×7) surface
- 31 December 1988
- journal article
- Published by Elsevier in Surface Science
- Vol. 195 (1-2) , 307-329
- https://doi.org/10.1016/0039-6028(88)90798-4
Abstract
No abstract availableThis publication has 18 references indexed in Scilit:
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