Thin-film inhomogeneities studied by energy-loss measurements using ion beams
- 1 February 1989
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review A
- Vol. 39 (3) , 1049-1052
- https://doi.org/10.1103/physreva.39.1049
Abstract
A method to evaluate thin-film thickness inhomogeneities is presented. It is based on the measurements of the first two moments of the energy-loss distributions of swift ions traversing thin foils at two different beam incidence angles. We apply the method to a set of thin (∼200-Å) aluminum foils, resolving thickness fluctuations of the order of 10%.Keywords
This publication has 11 references indexed in Scilit:
- Variation of peak energy for energy loss with angle of observationPhysical Review A, 1987
- Energy-loss distributions of 50–250-keV protons traversing thin solid foils: Determination of the skewness coefficient and influence of foil roughnessPhysical Review A, 1987
- Dependence of energy loss of light ions in Au on scattering angle and target thickness in the energy interval 25 to 500 keV/amuNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- The influence of foil inhomogeneities on the angular dependence of experimental stopping cross sectionsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- Experiments on the difference between most probable and mean energy loss for foil transmitted protonsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- Study of surface roughness using a microdensitometer analysis of electron micrographs of surface replicas: I Surface profilesJournal of the Optical Society of America, 1981
- Straggling in energy loss of energetic hydrogen and helium ionsNuclear Instruments and Methods, 1980
- Energy-loss straggling for protons and helium ionsPhysics Letters A, 1977
- Observation of X-ray interferences on thin films of amorphous siliconThin Solid Films, 1973
- Preparation of Extremely Thin Self-Supporting Metal FoilsReview of Scientific Instruments, 1971