42 GHz pin Germanium photodetector integrated in a silicon-on-insulator waveguide
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- 2 April 2009
- journal article
- Published by Optica Publishing Group in Optics Express
- Vol. 17 (8) , 6252-6257
- https://doi.org/10.1364/oe.17.006252
Abstract
A compact pin Ge photodetector is integrated in submicron SOI rib waveguide. The detector length is reduced down to 15 μm using butt coupling configuration which is sufficient to totally absorb light at the wavelength of 1.55 μm. A -3 dB bandwidth of 42 GHz has been measured at a 4V reverse bias with a responsivity as high as 1 A/W at the wavelength of 1.55 μm and a low dark current density of 60 mA/cm2. At a wavelength of 1.52 μm, a responsivity of 1 A/W is obtained under -0.5 V bias. The process is fully compatible with CMOS technology.Keywords
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