Low-Loss SOI Photonic Wires and Ring Resonators Fabricated With Deep UV Lithography
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- 4 May 2004
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 16 (5) , 1328-1330
- https://doi.org/10.1109/lpt.2004.826025
Abstract
We demonstrate single-mode photonic wires in silicon-on-insulator with propagation loss as low as 2.4 dB/cm, fabricated with deep ultraviolet lithography and dry etching. We have also made compact racetrack and ring resonators functioning as add-drop filters, attaining Q values larger than 3000 and low add-drop crosstalk.Keywords
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