New applications of r.f.-sputtered glass films as protection and bonding layers in silicon micromachining
- 1 April 1994
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 41 (1-3) , 338-343
- https://doi.org/10.1016/0924-4247(94)80134-7
Abstract
No abstract availableKeywords
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