Kinetics of the reaction of gallium arsenide with molecular chlorine
- 1 September 1988
- journal article
- Published by AIP Publishing in The Journal of Chemical Physics
- Vol. 89 (5) , 2844-2847
- https://doi.org/10.1063/1.454988
Abstract
The reaction of Cl2 with the (100) face of a GaAs single crystal was studied in the temperature range from 25 to 150 °C. The reaction was found to be first order in Cl2 at low pressures with an activation energy of 23.6 kcal. At pressures above 10 Torr it was found to reach a limiting rate with an activation energy of 14.2 kcal, attributable to the enthalpy of desorption of the GaCl3 product from this surface.Keywords
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