The synthesis and properties of BN films prepared by ion irradiation and vapor deposition
- 1 January 1993
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 80-81, 1485-1488
- https://doi.org/10.1016/0168-583x(93)90826-r
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- On the formation of BN films by ion beam and vapor depositionNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1988
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- Coating Films of Titanium Nitride Prepared by Ion and Vapor Deposition MethodJapanese Journal of Applied Physics, 1985
- Formation of Cubic Boron Nitride Films by Boron Evaporation and Nitrogen Ion Beam BombardmentJapanese Journal of Applied Physics, 1983