Simple ion milling preparation of 〈111〉 tungsten tips

27 March 1989

journal article
Published by AIP Publishing in Applied Physics Letters

Vol. 54 (13) , 1223-1225
https://doi.org/10.1063/1.100722

Abstract

Ion milling of single-crystal tungsten 〈111〉 wire results in a steady-state faceted tip which is sharp on a near-atomic scale. The self-limiting nature of the process makes preparation particularly simple and therefore useful for applications such as scanning tunneling microscope tips, focused ion beam sources, etc.

Keywords

STEADY STATE
SAMPLE PREPARATION
SCANNING TUNNELING MICROSCOPY
ION BEAM
SINGLE CRYSTAL
ELECTRON MICROSCOPY
SCANNING ELECTRON MICROSCOPY
FOCUSED ION BEAM
SCANNING TUNNELING MICROSCOPE

This publication has 2 references indexed in Scilit:

Ion milled tips for scanning tunneling microscopy
Applied Physics Letters, 1987
High resolution structuring of emitter tips for the gaseous field ionization source
Journal of Vacuum Science & Technology B, 1986