Microfabrication by UV femtosecond laser ablation of Pt, Cr and indium oxide thin films
- 1 October 1999
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 151 (3-4) , 159-170
- https://doi.org/10.1016/s0169-4332(99)00299-8
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
- Microdeposition of metal and oxide structures using ultrashort laser pulsesApplied Physics A, 1998
- Indium oxide thin-film holographic recorders grown by excimer laser reactive sputteringApplied Physics A, 1998
- Laser–solid interaction in the femtosecond time regimeApplied Surface Science, 1997
- Laser ablation and micromachining with ultrashort laser pulsesIEEE Journal of Quantum Electronics, 1997
- Excimer laser processing of indium-tin-oxide films: An optical investigationJournal of Applied Physics, 1995
- Deposition of micrometer-sized tungsten patterns by laser transfer techniqueApplied Physics Letters, 1994
- Laser-induced compound formation and transfer of stacked elemental layersThin Solid Films, 1994
- Laser-induced forward transfer of high-T c YBaCuO and BiSrCaCuO superconducting thin filmsJournal of Applied Physics, 1989
- A study of the mechanism of metal deposition by the laser-induced forward transfer processJournal of Vacuum Science & Technology B, 1987
- Metal deposition from a supported metal film using an excimer laserJournal of Applied Physics, 1986