Metal deposition from a supported metal film using an excimer laser
- 15 August 1986
- journal article
- conference paper
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 60 (4) , 1538-1539
- https://doi.org/10.1063/1.337287
Abstract
A method for the direct writing of metal features from a metal film supported on an optically transparent substrate using a single pulse from a high-energy excimer laser (193 nm) is presented. The technique eliminates the need for gas-phase precursors in many cases and is an inherently clean process. Results of copper depositions onto silicon substrates are shown to exemplify the technique and a mechanism for the process is proposed.This publication has 13 references indexed in Scilit:
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