Laser photodeposition of metal films with microscopic features
- 15 July 1979
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 35 (2) , 175-177
- https://doi.org/10.1063/1.91026
Abstract
Metal deposits with features smaller than 2 μm have been produced by the uv laser‐induced photodissociation of organometallic compounds. Such laser‐induced heterogeneous photochemical processes may have application in several areas of microelectronics including metallization, etching, and growth of semiconductor films.Keywords
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