Laser-induced metal deposition on InP

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Abstract
It has been demonstrated that platinum can be deposited on p-type, n-type, and undoped InP via pulsed laser irradiation of polished substrates immersed in an aqueous solution of chloroplatinic acid. Pulsed laser intensities sufficient to initiate thermal decomposition of the InP surface, yet below the threshold at which gross surface damage occurs, cause elemental platinum to be deposited on the surface. The platinum deposits in the form of rectangular islands on the (100) surface and trigonal structures on the (111) InP surface. Under certain conditions, the islands grow together to form smooth platinum films ∼0.5 μm thick. Failure to form deposits at low laser powers indicates that platinum deposition occurs via a thermal mechanism. Auger electron analysis indicates that the platinum deposits are free of oxygen and chlorine contamination. Preliminary results also indicate that this technique may be used to deposit platinum on GaAs, nickel on InP (using aqueous NiSO4 solutions), and gold on InP (using both aqueous and methanolic HAuCl4 solutions). Platinum and gold deposits on InP exhibit ohmic behavior.

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