Direct writing of regions of high doping on semiconductors by UV-laser photodeposition
- 1 June 1980
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 36 (11) , 916-918
- https://doi.org/10.1063/1.91366
Abstract
The direct doping of InP with variable Cd concentrations has been demonstrated in a maskless process with micrometer-scale spatial control. The process makes use of cw UV-laser photodeposition of the dopant on a laser-heated surface.Keywords
This publication has 6 references indexed in Scilit:
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