Adhesion improvement of plasma-deposited silica thin films on stainless steel substrate studied by x-ray photoemission spectroscopy and in situ infrared ellipsometry
- 1 January 1998
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 16 (1) , 6-12
- https://doi.org/10.1116/1.581013
Abstract
No abstract availableKeywords
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