N+-implantation induced enhanced adhesion of amorphous-SiC films deposited on stainless steel

21 February 1994

journal article
research article
Published by AIP Publishing in Applied Physics Letters

Vol. 64 (8) , 977-979
https://doi.org/10.1063/1.110924

Abstract

Amorphousa‐SiC films were deposited by rf magnetron sputtering on stainless steel and N+implantations were performed at room temperature over a fluence range of 1×1016–1×1017 ions/cm2 at 30 and 160 keV. Chemical characterization of the a‐SiC/steel interface and compositional depth profiles were obtained by Auger electron spectroscopy.Adhesion properties of the films were examined using a scratch tester in conjunction with scanning electron microscopy. A strong adhesion enhancement (about a factor of eight) along with an improvement of the fracture toughness were observed in the implanteda‐SiC/steel specimens. The key mechanisms envisaged to explain the enhanced adhesion is mainly related to the new chemical bondings, involving C and N in Si—(N,C)—Cr complexes formation at the a‐SiC/steel interface.

Keywords

This publication has 15 references indexed in Scilit:

Quantitative surface analysis (AES) of SiC
Surface and Interface Analysis, 1990
Ion-enhanced adhesion of Ni films on glassy carbon
Applied Surface Science, 1989
Adhesion of polymers to metals: A review of the results obtained studying a model system
Surface and Interface Analysis, 1988
On the N KLL spectra of some nitrides
Surface and Interface Analysis, 1987
Chemical state of ion-implanted nitrogen in iron
Physica Status Solidi (a), 1986
Observation of ion nitriding on Fe-Cr, Fe-Ni and Ni-Cr alloy surfaces in a glow discharge plasma
Surface and Interface Analysis, 1986
The effects of N 2 + and B+ ion implantation on the hardness behaviour and near-surface structure of SiC
Journal of Materials Science, 1986
A Comparison of the C KVV Auger Spectra of NbC and NbN_0.7C_0.3
Physica Status Solidi (b), 1985
Electron and ion beam degradation effects in AES analysis of silicon nitride thin films
Surface and Interface Analysis, 1985
Final-state effects in carbon Auger spectra of transition-metal carbides
Physical Review B, 1977