Growth and Characterization of Ba0.5Sr0.5TiO3 Thin Films on Si (100) By 90° Off-Axis Sputtering
- 1 January 1994
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
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This publication has 3 references indexed in Scilit:
- Excimer laser ablated barium strontium titanate thin films for dynamic random access memory applicationsApplied Physics Letters, 1993
- Barrier layers for realization of high capacitance density in SrTiO3 thin-film capacitor on siliconApplied Physics Letters, 1990
- I n s i t u grown YBa2Cu3O7−d thin films from single-target magnetron sputteringApplied Physics Letters, 1989