I n s i t u grown YBa2Cu3O7−d thin films from single-target magnetron sputtering

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Abstract
Using single‐target off‐axis sputter deposition, high quality superconducting films of YBa2Cu3O7−δ were made in situ. These films have properties which are distinctly different from those of bulk ceramics and of post‐deposition annealed films. Their superconducting resistive transitions remain sharp regardless of the value of Tc between 75 and 86 K. Normal‐state conductivities are as high or higher than the best single crystals. Critical current densities as high as 6×107 A/cm2 at 4.2 K. Tc (R=0) falls off with film thickness down to 10 K for 35–40 Å films. All of the above properties are relatively insensitive to compositional variation. The results can be explained if the in situ growth results in well‐formed CuO2 planes with defects occurring elsewhere.