Reactive magnetron sputtering of thin-film superconductor YBa2Cu3O7−x

Abstract
Superconducting thin films of YBa2Cu3O7−x have been successfully made by co‐sputtering from the three targets in an Ar and O2 mixture atmosphere. After high‐temperature anneal films are superconducting with an onset temperature at 90 K, a full transition temperature as high as 88 K, and a critical current density in excess of 1×105 A/cm2 at 78 K and 2×106 A/cm2 at 4.2 K. Highly oriented thin films have been obtained on SrTiO3 {100} substrates.