Growth of highly oriented La0.84Sr0.16MnO3 perovskite films
- 1 October 1995
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 10 (10) , 2518-2522
- https://doi.org/10.1557/jmr.1995.2518
Abstract
We have grown thin films of La0.84Sr0.16MnO3 on SrTiO3 (100), MgO (100), CeO2 (100)/Al2O3, and (100) oriented yttria-stabilized zirconia (YSZ) substrates by using a 90°off-axis RF magnetron sputtering deposition. X-ray diffraction analysis and ion beam channeling experiments reveal that the deposited films grow epitaxially on SrTiO3, biaxially textured on MgO, and highly textured on YSZ. Scanning tunneling microscopy reveals that the thin films possess extremely smooth surfaces.Keywords
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