A MEMS thermopneumatic silicone rubber membrane valve
- 1 January 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 64 (1) , 101-108
- https://doi.org/10.1016/s0924-4247(97)01660-9
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Mechanical property measurements of thin films using load-deflection of composite rectangular membranesSensors and Actuators, 1989