Mechanical property measurements of thin films using load-deflection of composite rectangular membranes
- 1 November 1989
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 20 (1-2) , 135-141
- https://doi.org/10.1016/0250-6874(89)87111-2
Abstract
No abstract availableKeywords
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