Integrated movable micromechanical structures for sensors and actuators
- 1 June 1988
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 35 (6) , 724-730
- https://doi.org/10.1109/16.2523
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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