Fabrication of microchannels by laser machining and anisotropic etching of silicon
- 1 April 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 32 (1-3) , 299-302
- https://doi.org/10.1016/0924-4247(92)80002-k
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Anisotropic laser etching of oxidized (100) siliconApplied Physics Letters, 1989
- Laser enhanced etching in KOHApplied Physics Letters, 1982
- The dissolution forms of single crystal spheres: III. Dissolution forms of Ge and SiJournal of Crystal Growth, 1975