Studies of excimer laser ablation of solids using a Michelson interferometer
- 16 June 1986
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 48 (24) , 1690-1692
- https://doi.org/10.1063/1.96807
Abstract
A Michelson interferometer has been used as a direct quantitative probe for gas phase plasma formation in the UV excimer laser ablation of solids. Excimer laser fluence thresholds for plasma formation are determined and correlated with optical emission from electronically excited ablation fragments.Keywords
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