Thermally actuated CMOS micromirrors
- 1 March 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 47 (1-3) , 572-575
- https://doi.org/10.1016/0924-4247(94)00964-j
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- A CMOS compatible thermally excited silicon oxide beam resonator with aluminum mirrorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Analysis of tip deflection and force of a bimetallic cantilever microactuatorJournal of Micromechanics and Microengineering, 1993
- Biaxial scanning mirror activated by bimorph structures for medical applicationsSensors and Actuators A: Physical, 1992