High-performance, low-noise digital controller for inchworm piezoelectric translators
- 1 October 1992
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 63 (10) , 4308-4313
- https://doi.org/10.1063/1.1143729
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Inchworm controller for fine approach in a scanning tunneling microscopeJournal of Vacuum Science & Technology A, 1991
- An ultrahigh vacuum scanning tunneling microscope with a new inchworm mechanismJournal of Vacuum Science & Technology A, 1990