Low-cost silicon sensors for mass flow measurement of liquids and gases
- 1 June 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 49 (1-2) , 17-20
- https://doi.org/10.1016/0924-4247(95)01016-t
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
- A micromachined flow sensor for liquid and gaseous fluidsSensors and Actuators A: Physical, 1994
- A high sensitivity CMOS gas flow sensor on a thin dielectric membraneSensors and Actuators A: Physical, 1993
- Micro-liquid flow sensorSensors and Actuators A: Physical, 1993
- An integrated sensor for invasive blood-velocity measurementSensors and Actuators A: Physical, 1993
- Monolithic flow sensor for measuring millilitre per minute liquid flowSensors and Actuators A: Physical, 1992
- Silicon thermal flow sensorsSensors and Actuators A: Physical, 1992
- The thermal modelling of a flow sensor based on differential convective heat transferSensors and Actuators A: Physical, 1991
- Microminiaturized thermistor arrays for temperature gradient, flow and perfusion measurementsSensors and Actuators A: Physical, 1991
- Integrated flow friction sensorSensors and Actuators, 1988
- A highly sensitive silicon chip microtransducer for air flow and differential pressure sensing applicationsSensors and Actuators, 1987