Determination of Arsenic, Antimony, and Bismuth in Silicon Using 200 keV α-Particle Backscattering

This publication has 2 references indexed in Scilit:

• The use of the neutron induced reaction for boron profiling in Si
  Nuclear Instruments and Methods in Physics Research, 1981
• The application of high-resolution Rutherford backscattering techniques to near-surface analysis
  Nuclear Instruments and Methods, 1978