Shell-body fabrication for micromachines
- 1 March 1995
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 5 (1) , 36-40
- https://doi.org/10.1088/0960-1317/5/1/007
Abstract
The shell body of a 1/1000 scale car was fabricated by numerically controlled NC machining, integrated circuit compatible processing and micro-electro-discharge processing as an experimental model of a micromachine. The gold-plated nickel body is 30 mu m thick, 4.8 mm long, 1.8 mm wide and 1.8 mm high. In the shell body, a 0.7 mm diameter motor is installed. The body powered by the electromagnetic motor runs at the speed of 100 mm/sec. The body and parts are fabricated as a miniature of a full scale model car by those techniques. Those microparts were assembled with a micromanipulator. This demonstration indicates the possibility for complex 3-dimensional machining.Keywords
This publication has 1 reference indexed in Scilit:
- Integrated movable micromechanical structures for sensors and actuatorsIEEE Transactions on Electron Devices, 1988