Measurement and modelling of surface micromachined, electrostatically actuated microswitches
- 22 November 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2, 1145-1148
- https://doi.org/10.1109/sensor.1997.635407
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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