Applications of Heavy-Ion Rutherford Backscattering Spectrometry (HIRBS) to the analysis of contact structures on GaAs and Ge
- 1 May 1985
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 10-11, 606-610
- https://doi.org/10.1016/0168-583x(85)90318-0
Abstract
No abstract availableKeywords
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