Manufacturability and applications of SiGe HBT technology
- 1 October 1997
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 41 (10) , 1503-1507
- https://doi.org/10.1016/s0038-1101(97)00096-8
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
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- Identification of perimeter depletion and emitter plug effects in deep-submicrometer, shallow-junction polysilicon emitter bipolar transistorsIEEE Transactions on Electron Devices, 1992
- The thermal stability of SiGe films deposited by ultrahigh-vacuum chemical vapor depositionJournal of Applied Physics, 1991
- Low-temperature silicon epitaxy by ultrahigh vacuum/chemical vapor depositionApplied Physics Letters, 1986